MEMS Gas Sensors: A Review

被引：128

作者：

Asri, Muhammad Izzudin Ahmad ^{[1
]}

Hasan, Md. Nazibul ^{[1
]}

Fuaad, Mariatul Rawdhah Ahmad ^{[1
]}

Yunos, Yusri Md. ^{[1
]}

Ali, Mohamed Sultan Mohamed ^{[1
]}

机构：

[1] Univ Teknol Malaysia, Fac Engn, Sch Elect Engn, Johor Baharu 81310, Johor, Malaysia

来源：

IEEE SENSORS JOURNAL | 2021年 / 21卷 / 17期

关键词：

Gas detectors; Sensors; Gases; Micromechanical devices; Chemical sensors; Optical sensors; Sensitivity; MEMS; gas sensor; electrochemical; optical; acoustic gas sensor; and medical gas sensor; QUARTZ-CRYSTAL MICROBALANCE; WALLED CARBON NANOTUBES; NO2 SENSING PROPERTIES; PHOTONIC CRYSTAL; ROOM-TEMPERATURE; THIN-FILMS; QCM SENSOR; REFRACTIVE-INDEX; GRAPHENE OXIDE; DOPED ZNO;

D O I：

10.1109/JSEN.2021.3091854

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years, several gas sensors have been developed to detect and analyze a wide range of gases. As sensor applications are expected to be further extended in the near future, it is, therefore, essential to review crucial types of gas sensors, their features, challenges, and a range of important applications. This paper presents a comprehensive review of the state-of-the-art gas sensors, which have been developed for gas sensing applications using MEMS technology. The working principle, the structure, the sensitive material and the important characteristics of each of these sensors are discussed. The focus of this review is on applications surrounding the use of electrochemical, optical and acoustic gas sensors for biomedical applications.

引用

页码：18381 / 18397

页数：17