Effect of bottom electrodes on the dielectric properties of barium strontium titanate thin films

被引：5
|
作者：
Yu, HC [1 ]
Li, M [1 ]
Hui, C [1 ]
Xu, AL [1 ]
Shao, WW [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Res Inst Micro Nanometer Sci & Technol, Shanghai 200030, Peoples R China
来源：
THIN SOLID FILMS | 2005年 / 493卷 / 1-2期
关键词：
sol-gel method; barium strontium titanate; bottom electrodes; dielectric properties;
D O I：
10.1016/j.tsf.2005.06.018
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Barium strontium titanate (Ba0.5Sr0.5TiO3, BST) thin films were prepared on Pt/Ti/SiO2/Si and Pt/Cr/SiO2/Si substrates by sol-gel method. The effects of Pt/Ti and Pt/Cr bottom electrodes on the microstructure and dielectric properties of BST thin films were studied. The X-ray diffraction patterns show that both these films crystallize into a perovskite structure. The atomic force micrographs indicate that the films using Pt/Ti and Pt/Cr as bottom electrodes have different grain distributions and grain sizes. The dielectric constant of the films using Pt/Cr as bottom electrodes decreases significantly and the loss tangent and tunability decrease slightly. However, the figure of merit of the films using Pt/Cr as bottom electrodes still increases from 24.3 to 27.6. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：20 / 23
页数：4
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