Fractional Repetitive Control of Nanopositioning Stages for High-Speed Scanning Using Low-Pass FIR Variable Fractional Delay Filter

被引:25
作者
Li, Linlin [1 ]
Chen, Zaozao [1 ]
Aphale, Sumeet S. [2 ]
Zhu, LiMin [1 ,3 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Mech Engn, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China
[2] Univ Aberdeen, Sch Engn, Ctr Appl Dynam Res, Aberdeen AB24 3UE, Scotland
[3] Shanghai Key Lab Adv Mfg Environm, Shanghai 200240, Peoples R China
基金
中国国家自然科学基金;
关键词
Fractional delay filter; high-speed raster scanning; nanopositioning stages; nonsynchronized sampling; repetitive control (RC); DESIGN; HYSTERESIS; COMPENSATION; PERFORMANCE; INVERSION; ERRORS;
D O I
10.1109/TMECH.2020.2969222
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
The repetitive control (RC), capable of tracking periodic trajectories and rejecting periodic disturbances, is a promising technique to control the nanopositioning stages for high-speed raster scanning. In digital implementation of the RC scheme, the number of delay points has to be an integer, which implies that the sampling frequency should be an integer multiple of the desired tracking frequency. Clearly, this is a severe limitation on the range of the trajectory frequencies where the RC scheme can effectively be applied. To overcome this limitation, this article proposes a low-pass FIR variable fractional delay filter as an alternative to the conventional interpolating method employed in conventional fractional RC scheme. This filter combines the interpolating and the low-pass filtering that are employed in the fractional RC and its coefficients are analytically computed as a function of fractional delay; thereby, making it suitable for trajectories of all frequencies. The weighted-least-square method is employed to design the low-pass FIR variable fractional delay filter, where the weights are tuned to minimize the approximation errors within the bandwidth-of-interested. Experimental results are presented to demonstrate the advantages of the proposed method over the conventional RC scheme as well as the interpolating-based fractional RC scheme. These results show that the proposed RC scheme with low-pass FIR variable fractional delay filter improves the tracking performance of the nanopositioner significantly, especially for the trajectories with high-frequency.
引用
收藏
页码:547 / 557
页数:11
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