Preparation and properties of Ba1-xSrxTiO3 thin films deposited by the sol-gel technique

被引：1

作者：

Dien, E ^{[1
]}

Verveur, R ^{[1
]}

Lejeune, M ^{[1
]}

Smith, A ^{[1
]}

机构：

[1] Ecole Natl Super Ceram Ind, Lab Mat Ceram & Traitements Surface, ESA 6015, F-87065 Limoges, France

来源：

JOURNAL DE PHYSIQUE IV | 1998年 / 8卷 / P9期

关键词：

D O I：

10.1051/jp4:1998912

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The present work concerns the preparation and the physical properties of Ba0.67Sr0.33TiO3 composition under thin film form. The layers have been deposited by spin-coating on top of Pt/Ti/SiO2/Si substrates using barium and strontium acetates, dissolved in acetic acid, mixed up with titanium tetra-isopropoxide in 2-propanol. The amounts of each constituent have been carefully adjusted to obtain stable and homogeneous sols. Different thermal treatments of the deposited layers have been carried out. They consist of a pre-firing cycle (330 degrees C or 550 degrees C) followed by a rapid thermal annealing (RTA) at 800 degrees C. The final films are characterized by a thickness in the range 180-600 nm and an average crystallite size of 40 nm. This paper also presents the electrical characteristics of the deposits. So far, the best dielectric constant, epsilon(r), is of the order of 350. Variations of epsilon' and epsilon " with respect to temperature (from -20 degrees C to 120 degrees C) have been investigated.

引用

页码：73 / 77

页数：5

共 9 条

[1] Factors controlling carbon retention in YBa2Cu3O7-delta [J].