Design of the chirped multilayer mirrors in Extreme Ultraviolet region for ultrafast applications

被引:0
作者
Wang, Fengli [1 ]
Liu, Lei [1 ]
Zhu, Jingtao [1 ]
Zhang, Zhong [1 ]
Li, Wenbin [1 ]
Wang, Zhanshan [1 ]
Chen, Lingyan [1 ]
机构
[1] Tongji Univ, Dept Phys, Inst Precis Opt Engn, Shanghai 200092, Peoples R China
来源
SEVENTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS | 2011年 / 7995卷
关键词
Chirped multilayer; group delay dispersion; genetic algorithm; reflectivity; phase; ATTOSECOND PULSES;
D O I
10.1117/12.888421
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Chirped Mo/Si multilayer mirrors used in 13-17nm region have been designed using analytical approach based on the combination of genetic algorithm and simplex algorithm. The Cauchy equation and the polynomial expression were used to fit the real part and the imaginary part of the optical constants of Mo and Si in the wavelength region of 12.8-17.2nm, respectively. The reflectivity, reflective phase, group delay and group delay dispersion of the multilayer were calculated based on the Fresnel iterative equations. The initial structure of the multilayer was obtained by using the genetic algorithm, and the final structure of the mirror was optimized by using the simplex algorithm. We got the different multilayer mirrors for the target GDD of -2800 as(2), -3600 as(2), and -6500 as(2). For these three multilayer mirrors, the average reflectivities in the wavelength range of 13-17 nm are 7.00 +/- 0.08 %, 5.99 +/- 0.05 %, and 6.00 +/- 0.05 %, respectively. And the average GDD in the same wavelength range are -2793.22 +/- 104.00 as(2),-3597.44 +/- 79.06 as(2), and 6498.13 +/- 59.96 as(2). In addition, the effects of the interface roughness on the reflectivity and the phase were discussed. It is found that the reflectivity is sensitive to the interface roughness, but the phase is insensitive.
引用
收藏
页数:4
相关论文
共 44 条
  • [41] Design of a compact multilayer circularly polarized phased array transmit antenna system for satellite applications
    Moghaddam, Elham Sharifi
    AEU-INTERNATIONAL JOURNAL OF ELECTRONICS AND COMMUNICATIONS, 2016, 70 (09) : 1142 - 1155
  • [42] Soft X-ray reflectivity and structure evaluation of Ni/C/Ti/C multilayer X-ray mirrors for water-window region
    Takenaka, H
    Ito, H
    Nagai, K
    Muramatsu, Y
    Gullikson, E
    Perera, RCC
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2001, 467 : 341 - 344
  • [43] Design of Polycarbonate/Polymethyl Methacrylate Polymer Multilayer Alternating Films with High Reflectivity in Near-Infrared Region
    Liang, Huang
    Yang Weimin
    Lin Chengyou
    Jiao Zhiwei
    Shi Meinong
    LASER & OPTOELECTRONICS PROGRESS, 2019, 56 (04)
  • [44] A proposed design and fabrication of lenses and mirrors from a set of spherical rings that produce desired energy distributions for solar energy applications
    Gonzalez-Garcia, Jorge
    Vazquez-Montiel, Sergio
    Santiago-Alvarado, Agustin
    Cordero-Davila, Alberto
    Castro-Gonzalez, Graciela
    SOLAR ENERGY, 2009, 83 (12) : 2205 - 2216