Review of Optical Humidity Sensors

被引：51

作者：

Rao, Xing ^{[1
,2
]}

Zhao, Lin ^{[3
]}

Xu, Lukui ^{[1
,2
]}

Wang, Yuhang ^{[1
,2
]}

Liu, Kuan ^{[1
,2
]}

Wang, Ying ^{[1
,2
]}

Chen, George Y. ^{[1
,2
]}

Liu, Tongyu ^{[3
]}

Wang, Yiping ^{[1
,2
]}

机构：

[1] Shenzhen Univ, Coll Phys & Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ GuangDong Prov, Shenzhen 518060, Peoples R China

[2] Shenzhen Univ, Guangdong & Hong Kong Joint Res Ctr Opt Fibre Sen, Shenzhen Key Lab Photon Devices & Sensing Syst In, Shenzhen 518060, Peoples R China

[3] Qilu Univ Technol, Laser Inst, Shandong Acad Sci, Jinan 250353, Peoples R China

来源：

SENSORS | 2021年 / 21卷 / 23期

基金：

中国国家自然科学基金;

关键词：

humidity; RH; moisture; hygrometer; optical fiber; review; MACH-ZEHNDER INTERFEROMETER; FABRY-PEROT-INTERFEROMETER; SURFACE-ACOUSTIC-WAVE; RELATIVE-HUMIDITY; HIGH-SENSITIVITY; GRAPHENE-OXIDE; PHOTONIC-CRYSTAL; FIBER SENSOR; OPTOELECTRONIC HUMIDITY; THIN-FILM;

D O I：

10.3390/s21238049

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Optical humidity sensors have evolved through decades of research and development, constantly adapting to new demands and challenges. The continuous growth is supported by the emergence of a variety of optical fibers and functional materials, in addition to the adaptation of different sensing mechanisms and optical techniques. This review attempts to cover the majority of optical humidity sensors reported to date, highlight trends in design and performance, and discuss the challenges of different applications.

引用

页数：61

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