Review of Optical Humidity Sensors

被引：51
作者：
Rao, Xing [1 ,2 ]
Zhao, Lin [3 ]
Xu, Lukui [1 ,2 ]
Wang, Yuhang [1 ,2 ]
Liu, Kuan [1 ,2 ]
Wang, Ying [1 ,2 ]
Chen, George Y. [1 ,2 ]
Liu, Tongyu [3 ]
Wang, Yiping [1 ,2 ]
机构：
[1] Shenzhen Univ, Coll Phys & Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ GuangDong Prov, Shenzhen 518060, Peoples R China
[2] Shenzhen Univ, Guangdong & Hong Kong Joint Res Ctr Opt Fibre Sen, Shenzhen Key Lab Photon Devices & Sensing Syst In, Shenzhen 518060, Peoples R China
[3] Qilu Univ Technol, Laser Inst, Shandong Acad Sci, Jinan 250353, Peoples R China
来源：
SENSORS | 2021年 / 21卷 / 23期
基金：
中国国家自然科学基金;
关键词：
humidity; RH; moisture; hygrometer; optical fiber; review; MACH-ZEHNDER INTERFEROMETER; FABRY-PEROT-INTERFEROMETER; SURFACE-ACOUSTIC-WAVE; RELATIVE-HUMIDITY; HIGH-SENSITIVITY; GRAPHENE-OXIDE; PHOTONIC-CRYSTAL; FIBER SENSOR; OPTOELECTRONIC HUMIDITY; THIN-FILM;
D O I：
10.3390/s21238049
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Optical humidity sensors have evolved through decades of research and development, constantly adapting to new demands and challenges. The continuous growth is supported by the emergence of a variety of optical fibers and functional materials, in addition to the adaptation of different sensing mechanisms and optical techniques. This review attempts to cover the majority of optical humidity sensors reported to date, highlight trends in design and performance, and discuss the challenges of different applications.
引用
收藏
页数：61
相关论文
共 229 条
  • [1] A humidity sensor based on a hetero-core optical fiber
    Akita, Shohei
    Sasaki, Hiroyuki
    Watanabe, Kazuhiro
    Seiki, Atsushi
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2010, 147 (02): : 385 - 391
  • [2] High sensitivity balloon-like interferometric optical fiber humidity sensor based on tuning gold nanoparticles coating thickness
    Al-Hayali, Sarah Kadhim
    Salman, Ansam M.
    Al-Janabi, Abdul Hadi
    [J]. MEASUREMENT, 2021, 170
  • [3] High-sensitivity sensor of low relative humidity based on overlay on side-polished fibers
    Alvarez-Herrero, A
    Guerrero, H
    Levy, D
    [J]. IEEE SENSORS JOURNAL, 2004, 4 (01) : 52 - 56
  • [4] Design and performance evaluation of polyvinyl alcohol/polyimide coated optical fibre grating-based humidity sensors
    Alwis, L.
    Sun, T.
    Grattan, K. T. V.
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (02)
  • [5] Fibre optic long period grating-based humidity sensor probe using a Michelson interferometric arrangement
    Alwis, L.
    Sun, T.
    Grattan, K. T. V.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2013, 178 : 694 - 699
  • [6] Analysis of Polyimide-Coated Optical Fiber Long-Period Grating-Based Relative Humidity Sensor
    Alwis, Lourdes
    Sun, Tong
    Grattan, Kenneth V.
    [J]. IEEE SENSORS JOURNAL, 2013, 13 (02) : 767 - 771
  • [7] Relative humidity sensor based on SMS fiber structure with polyvinyl alcohol coating
    An, Jiali
    Zhao, Yu
    Jin, Yongxing
    Shen, Changyu
    [J]. OPTIK, 2013, 124 (23): : 6178 - 6181
  • [8] Humidity-sensitive optical absorption of Co3O4 film
    Ando, M
    Kobayashi, T
    Haruta, M
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1996, 32 (02) : 157 - 160
  • [9] Titanium dioxide nanoparticle based optical fiber humidity sensor with linear response and enhanced sensitivity
    Aneesh, R.
    Khijwania, Sunil K.
    [J]. APPLIED OPTICS, 2012, 51 (12) : 2164 - 2171
  • [10] Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by the ionic self-assembly method
    Arregui, FJ
    Liu, YJ
    Matias, IR
    Claus, RO
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1999, 59 (01) : 54 - 59
12345678910