Conducting Sb-doped SnO2 as gas sensor

被引：0

作者：

Marlianto, E

Yahaya, M

Salleh, MM

机构：

来源：

ICSE '96 - 1996 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS | 1996年

关键词：

D O I：

10.1109/SMELEC.1996.616488

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The Sb-doped SnO2 thin films have been developed for gas sensors applications. The mechanism of sensing is based on the absorption and desorption of gases on the films surface that change the electrical resistivity of the films. Thin films of SnO2 were prepared on the glass slide substrates by spray pyrolysis method. The films in the range of 2000-5000 Angstrom are very sensitive to O-2 and CO2 and less sensitive to Nz gas. The basic principles of the mechanism of action will be described in details.

引用

页码：229 / 233

页数：5