Deposition of PbTiO3 tilms on Pt/Si substrates using pulsed laser deposition

Lead titanate (PbTiO3) thin films were prepared on platinised silicon substrates by pulsed laser deposition. A predominantly (1 1 1) oriented perovskite phase was obtained at a substrate temperature of 530 degrees C. Deposition at higher substrate temperatures resulted in the formation of a lead deficient pyrochlore phase PbTi3O7. The (1 1 1) orientation was slightly enhanced with an increase in the oxygen deposition pressure from 100mTorr to 150mTorr. A similar effect was observed with an increase in the post-deposition annealing temperature from 400 degrees C to 600 degrees C. P-E loops with remanent polarization (P-r) as high as 40 mu C/cm(2) and coercive field E-c = 105 kV/cm were obtained under an electric field of an amplitude of 270 kV/cm at 50 kHz. Impedance spectroscopy and leakage current behaviour of the films are also reported. (c) 2007 Elsevier Ltd. All rights reserved.