Deposition of PbTiO3 tilms on Pt/Si substrates using pulsed laser deposition

被引：35

作者：

Khan, Mikael A. ^{[1
]}

Comyn, Timothy P. ^{[1
]}

Bell, Andrew J. ^{[1
]}

机构：

[1] Univ Leeds, Inst Mat Res, Leeds LS2 9JT, W Yorkshire, England

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2008年 / 28卷 / 03期

基金：

英国工程与自然科学研究理事会;

关键词：

films; electron microscopy; ferroelectric properties; perovskites; pulsed laser deposition (PLD); PbTiO3;

D O I：

10.1016/j.jeurceramsoc.2007.07.023

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Lead titanate (PbTiO3) thin films were prepared on platinised silicon substrates by pulsed laser deposition. A predominantly (1 1 1) oriented perovskite phase was obtained at a substrate temperature of 530 degrees C. Deposition at higher substrate temperatures resulted in the formation of a lead deficient pyrochlore phase PbTi3O7. The (1 1 1) orientation was slightly enhanced with an increase in the oxygen deposition pressure from 100mTorr to 150mTorr. A similar effect was observed with an increase in the post-deposition annealing temperature from 400 degrees C to 600 degrees C. P-E loops with remanent polarization (P-r) as high as 40 mu C/cm(2) and coercive field E-c = 105 kV/cm were obtained under an electric field of an amplitude of 270 kV/cm at 50 kHz. Impedance spectroscopy and leakage current behaviour of the films are also reported. (c) 2007 Elsevier Ltd. All rights reserved.

引用

页码：591 / 597

页数：7

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