Photo-induced electrical instability in hydrogenated amorphous silicon based thin-film transistors and the effect of its phase transition

被引:4
作者
Ha, Tae-Jun [1 ]
机构
[1] Kwangwoon Univ, Dept Elect Mat Engn, Seoul 139701, South Korea
基金
新加坡国家研究基金会;
关键词
a-Si: H TFTs; Photo-induced instability; Phase transition; Charge trapping; Defect-states creation; METASTABLE DEFECTS; SOLAR-CELLS; DEPENDENCE; STRESS; SI;
D O I
10.1016/j.cap.2015.01.004
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We investigate the origin of photo-induced electrical instability in hydrogenated amorphous silicon based thin-film transistors (a-Si: H TFTs). Photo instability alone was accompanied by a positive shift in the threshold voltage (V-TH) caused by photo irradiation, and even larger positive or negative shift further exacerbated the instability caused by photo-induced electrical bias stress. Such phenomena can occur as a result of extended charge trapping and/or the creation of defect-states at the semiconductor/dielectric interface or in the gate dielectric. The mechanism for such is difficult to describe through chemical interactions of electron-donating and -withdrawing molecules that exhibit a shift in V-TH in only one direction. We also prove that a transition from an amorphous to a protocrystalline phase improves the photo-induced electrical stability. Such results originate from a reduction in the density of the localized states in protocrystalline-Si: H films relative to that of a-Si: H. We believe that this study provides significant information on the device physics of optoelectronics, which commonly exhibit photo-induced instability and charge transport, as a result of prolonged exposure to photo irradiation. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:330 / 334
页数:5
相关论文
共 26 条
[1]   DEFECT RELAXATION IN AMORPHOUS-SILICON - STRETCHED EXPONENTIALS, THE MEYER-NELDEL RULE, AND THE STAEBLER-WRONSKI EFFECT [J].
CRANDALL, RS .
PHYSICAL REVIEW B, 1991, 43 (05) :4057-4070
[2]   LIGHT-INDUCED ANNEALING OF METASTABLE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON [J].
GRAEFF, CFO ;
BUHLEIER, R ;
STUTZMANN, M .
APPLIED PHYSICS LETTERS, 1993, 62 (23) :3001-3003
[3]   High quality nanocrystalline silicon thin film fabricated by inductively coupled plasma chemical vapor deposition at 350 °C [J].
Han, Sang-Myeon ;
Kim, Sun-Jae ;
Park, Joong-Hyun ;
Choi, Sung-Hwan ;
Han, Min-Koo .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2008, 354 (19-25) :2268-2271
[4]   High mobility bottom gate nanocrystalline-Si thin-film transistors [J].
Hara, Masaki .
THIN SOLID FILMS, 2011, 519 (11) :3922-3924
[5]   A COMPREHENSIVE DEFECT MODEL FOR AMORPHOUS-SILICON [J].
HATA, N ;
WAGNER, S .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (07) :2857-2872
[6]  
Hepburn A.R., PHYS REV LETT
[7]   Charge density dependence of photoinduced stress in semiconductors [J].
Inui, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (3A) :1675-1679
[8]   CREATION OF NEAR-INTERFACE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON SILICON-NITRIDE HETEROJUNCTIONS - THE ROLE OF HYDROGEN [J].
JACKSON, WB ;
MOYER, MD .
PHYSICAL REVIEW B, 1987, 36 (11) :6217-6220
[9]   Threshold voltage instability of amorphous silicon thin-film transistors under constant current stress [J].
Jahinuzzaman, SM ;
Sultana, A ;
Sakariya, K ;
Servati, P ;
Nathan, A .
APPLIED PHYSICS LETTERS, 2005, 87 (02)
[10]   Effect of Drain Bias Stress on Stability of Nanocrystalline Silicon Thin Film Transistors with Various Channel Lengths [J].
Kim, Sun-Jae ;
Park, Sang-Geun ;
Ji, Seon-Beom ;
Han, Min-Koo .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (04)