Three Chips Stacking with Low Volume Solder Using Single Re-Flow Process

被引:7
作者
Khan, Navas [1 ]
Wee, David Ho Soon [1 ]
Chiew, Ong Siong [1 ]
Sharmani, Cheryl [1 ]
Lim, Li Shiah [1 ]
Li, Hong Yu [1 ]
Vasarala, Shekar [1 ]
机构
[1] ASTAR, Inst Microelect, Singapore 117685, Singapore
来源
2010 PROCEEDINGS 60TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC) | 2010年
关键词
D O I
10.1109/ECTC.2010.5490686
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Miniaturized 3D package with shorter distances between chips are needed for the mobile and high frequency applications. Chip-to-chip stacking for 3D packaging using conventional assembly method and single step reflow attachment is the most cost-effective. But fine pitch micro-joints of stacked chip by single re-flow attachment is challenging due to chip movement during stacking processes, which lead to poor assembly yields. This paper reports a method of stacking chips by thermal tacking and permanent joints are formed simultaneously by single re-flow step. Three chips of 12mm x 12mm size with micro bumps at 100um pitch have been assembled using this approach. Low volume of lead free solder (Sn) has been chosen for the micro-bump interconnections between the chips. The thermal tacking conditions and flip-chip assembly process have been studied in details. The micro-joints quality and reliability have been assessed and reported.
引用
收藏
页码:884 / 888
页数:5
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