Hyperelastic pressure sensing with a liquid-embedded elastomer

被引：425

作者：

Park, Yong-Lae ^{[1
]}

Majidi, Carmel ^{[2
]}

Kramer, Rebecca ^{[2
]}

Berard, Phillipe ^{[3
]}

Wood, Robert J. ^{[1
,2
]}

机构：

[1] Harvard Univ, Wyss Inst Biologically Inspired Engn, Boston, MA 02115 USA

[2] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA

[3] Ecole Polytech Fed Lausanne, Lab Intelligent Syst, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2010年 / 20卷 / 12期

基金：

美国国家科学基金会;

关键词：

SENSOR; SILICON;

D O I：

10.1088/0960-1317/20/12/125029

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A hyperelastic pressure transducer is fabricated by embedding silicone rubber with microchannels of conductive liquid eutectic gallium-indium. Pressing the surface of the elastomer with pressures in the range of 0-100 kPa will deform the cross-section of underlying channels and change their electric resistance by as much as 50%. Microchannels with dimensions as small as 25 mu m are obtained with a maskless, soft lithography process that utilizes direct laser exposure. Change in electrical resistance is measured as a function of the magnitude and area of the surface pressure as well as the cross-sectional geometry, depth and relative lateral position of the embedded channel. These experimentally measured values closely match closed-form theoretical predictions derived from plane strain elasticity and contact mechanics.

引用

页数：6

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