Miniature Fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

被引：0

作者：

Xie, H. ^{[1
,2
]}

Lan, S. ^{[2
]}

Wang, D. ^{[2
]}

Wang, W. ^{[1
]}

Sun, J. ^{[2
]}

Liu, H. ^{[2
]}

Cheng, J. ^{[2
]}

Ding, J. ^{[2
]}

Qin, Z. ^{[2
]}

Chen, Q. ^{[2
]}

Kang, H. ^{[3
]}

Tian, Z. ^{[3
]}

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA

[2] WiO Technol Ltd Co, Wuxi, Peoples R China

[3] Xiamen Univ, Xiamen, Peoples R China

来源：

2015 IEEE SENSORS | 2015年

关键词：

Fourier transform spectrometer; MEMS scanning mirror; large piston scan; microspectrometer; thermal actuator; NEAR-INFRARED SPECTROSCOPY;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 mu m piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03 degrees. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.

引用

页码：556 / 559

页数：4

共 13 条

[1] Prediction of chicken quality attributes by near infrared spectroscopy
Barbin, Douglas Fernandes
Kaminishikawahara, Cintia Midori
Soares, Adriana Lourenco
Mizubuti, Ivone Yurika
Grespan, Moises
Shimokomaki, Massami
Hirooka, Elisa Yoko
[J]. FOOD CHEMISTRY, 2015, 168 : 554 - 560
[2] Near-infrared spectroscopy for analysis of chemical and microbiological properties of forest soil organic horizons in a heavy-metal-polluted area
Chodak, Marcin
Niklinska, Maria
Beese, Friedrich
[J]. BIOLOGY AND FERTILITY OF SOILS, 2007, 44 (01) : 171 - 180
[3] FOURIER-TRANSFORM INFRARED SPECTROMETRY
GRIFFITHS, PR
[J]. SCIENCE, 1983, 222 (4621) : 297 - 302
[4] Analytical modeling and tolerance analysis of a linear variable filter for spectral order sorting
Ko, Cheng-Hao
Chang, Kuei-Ying
Huang, You-Min
[J]. OPTICS EXPRESS, 2015, 23 (04): : 5102 - 5116
[5] A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications
Samuelson, Sean R.
Xie, Huikai
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2014, 23 (01) : 39 - 49
[6] Sandner T., 2011, P SENS TEST IRS, P151
[7] Miniaturized LIGA Fourier Transformation Spectrometer
Solf, C
Mohr, J
Wallrabe, U
[J]. PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2, 2003, : 773 - 776
[8] Wang W., 2015, P IEEE TRANSD 2015, P212
[9] Miniaturizing Fourier Transform Spectrometer With an Electrothermal Micromirror
Wang, Wei
Samuelson, Sean R.
Chen, Jiapin
Xie, Huikai
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 27 (13) : 1418 - 1421
[10] Wu L., PROC OF THE 15TH INT, P2090

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