Thermal sensitivity study of thin film over-layered SAW devices for sensor applications

被引：3
作者：
Rajput, Pooja [1 ,2 ]
Kumar, Jitender [2 ]
Mittal, Upendra [2 ]
Nimal, A. T. [2 ]
V. Arsenin, Aleksey [3 ]
Volkov, Valentyn S. [3 ]
Mishra, Prabhash [1 ,3 ,4 ]
机构：
[1] Cent Univ, Ctr Nanosci & Nanotechnol, Jamia Millia Islamia, New Delhi 110025, India
[2] Solid State Phys Lab, Delhi 110054, India
[3] Moscow Inst Phys & Technol, Ctr Photon & Mat 2D, Moscow 141700, Russia
[4] Cent Univ, Ctr Nanosci & Nanotechnol, Jamia Millia Islamia, New Delhi, India
来源：
INORGANIC CHEMISTRY COMMUNICATIONS | 2022年 / 146卷
关键词：
Group delay; Phase shift; SAW resonator; Sensitivity; Temperature; ST-CUT QUARTZ; RESONATORS; DEPENDENCE; STABILITY;
D O I：
10.1016/j.inoche.2022.110116
中图分类号：
O61 [无机化学];
学科分类号：
070301 ; 081704 ;
摘要：
This paper presents the sensitivity study of ST-X quartz-based SAW sensor under the influence of temperature. SAW sensor based on ST-quartz structure with different non-conductive overlayers, including metal oxides (TiO2, ZnO) and polymers are used in the present work. Thermal study of SAW sensor with temperature compensated over-layer has been studied. In order to the study thermal behavior of SAW sensors, a shift in magnitude, centre frequency, phase, group delay, temperature coefficient of frequency (TCF) has been studied for temperature ranges 5-150 degrees C. The experimental results showed that uncoated/SAW sensors are more sensitive to temperature change but SAW sensor with overlayer shows less susceptible behavior to temperature change. TCF values for polymer/SAW, ZnO/SAW, and TiO2/SAW are-27.125 ppm/degrees C,-21.67 ppm/degrees C,-14.4 ppm/degrees C respectively. The main outcome of this study is that an overlayer as temperature compensated layer will reduce the sensor's sensitivity but make sensor less susceptible to temperature changes and also improves sensor's stability. This study will be useful for physical as well as chemical sensing applications.
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页数：6
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