Design of a self-contained 3D microvalve in PDMS

被引：0

作者：

Namasivayam, V ^{[1
]}

Liu, RH ^{[1
]}

Towe, B ^{[1
]}

Grodzinski, P ^{[1
]}

机构：

[1] Univ Michigan, Dept Chem Engn, Ann Arbor, MI 48109 USA

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

low-power microvalve; PDMS; Vertrel;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A self-contained, thermopneumatically actuated PDMS (polydimethylsiloxane) microvalve was designed, fabricated and tested. The device consists of a 3D PDMS microchannel network constructed using multilayer soft lithography process. A working liquid "Vertrel" was employed as the actuator that facilitates low temperature operations (< 60 degrees C), yields fast time response (similar to 2 s) and consumes low power (similar to 200 mW). The active area of the valve incorporates a 3D design of the valve seat and a flexible PDMS membrane that provides large displacements (similar to 200 mum). Complete sealing with zero leakage was achieved.

引用

页码：1228 / 1231

页数：4