Spinose carbon nanotubes grown on graphitized DLC film by low frequency r.f. plasma-enhanced chemical vapor deposition

Spinose carbon nanotubes (SCNTs) are grown on silicon substrates covered with diamond-like carbon film and iron catalyst film (Fe/DLC/Si structure) by low frequency r.f. plasma-enhanced chemical vapor deposition (LFRF-PECVD). During the pretreatment of the Fe/DLC/Si substrate, there are three processes happened, namely, iron film spalled to small islands, the DLC film graphitized, and the iron island reacted partially with the graphitized DLC (GDLC), which can be deduced from the Raman spectroscopy and SEM pictures. SCNTs film grew from C2H2-H-2 mixture under low plasma density. The good contact of carbon nanotube with GDLC film was acquired by the accumulation of the graphite sheets and the reaction between the iron particles and GDLC film. The homogeneous spines with the length of approximately 15 nm and the thickness of <5 nm burgeoned from the defects at the wall of carbon nanotube and distributed uniformly, which were in fact thin bent or rolled-up graphite sheets. (C) 2003 Elsevier B.V. All rights reserved.