Surface modifications of TiN coating by pulsed TEA CO2 and XeCl lasers

被引:27
作者
Trtica, MS
Tarasenko, VF
Gakovic, BM
Fedenev, AV
Petkovska, LT
Radak, BB
Lipatov, EI
Shulepov, MA
机构
[1] Vinca Inst Nucl Sci, Belgrade 11001, Serbia Monteneg
[2] Russian Acad Sci, Inst High Current Elect, SB, Tomsk 634055, Russia
关键词
laser surface modification; TiN coating; grainy microstructure; pulsed TEA carbon-dioxide laser; pulsed excimer XeCl laser;
D O I
10.1016/j.apsusc.2005.01.029
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Interactions of a transversely excited atmospheric (TEA) CO2 laser and an excimer XeCl laser, pulse durations similar to 2 mu s (initial spike FWHM similar to 100 ns) and similar to 20 ns (FWHM), respectively, with polycrystalline titanium nitride (TiN) coating deposited on high quality steel AISI 316, were studied. Titanium nitride was surface modified by the laser beams, with an energy density of 20.0 J/cm(2) (TEA CO2 laser) and 2.4 J/cm(2) (XeCl laser), respectively. The energy absorbed from the CO2 laser beam is partially converted to thermal energy, which generates a series of effects such as melting, vaporization of the molten material, shock waves, etc. The energy from the excimer XeCl laser primarily leads to fast and intense target evaporation. The calculated maximum temperatures on the target surface were 3770 and 6300 K for the TEA CO2 and XcCl lasers, respectively. It is assumed that the TEA CO2 laser affects the target deeper, for a longer time than the XeCl laser. The effects of the XeCl laser are confined to a localized area, near target surface, within a short time period. Morphological modifications of the titanium nitride surface can be summarized as follows: (i) both lasers produced ablation of the TiN coating in the central zone of the irradiated area and creation of grainy structure with near homogeneous distribution; (ii) a hydrodynamic feature, like resolidified droplets of the material, appeared in the surrounding peripheral zone; (iii) the process of irradiation, in both cases, was accompanied by appearance of plasma in front of the target. Target color modifications upon laser irradiation indicate possible chemical changes, possibly oxidation. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:474 / 482
页数:9
相关论文
共 16 条
  • [1] Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air
    Bonse, J
    Sturm, H
    Schmidt, D
    Kautek, W
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 71 (06): : 657 - 665
  • [2] Femtosecond laser micromachining of technical materials
    Bonse, J
    Baudach, S
    Krüger, J
    Kautek, W
    [J]. HIGH-POWER LASER ABLATION III, 2000, 4065 : 161 - 172
  • [3] Transversely excited atmospheric CO2 laser-induced damage of TiN and (Ti,Al)N coatings
    Gakovic, BM
    Trtica, M
    Nenadovic, T
    Gredic, T
    [J]. APPLIED SURFACE SCIENCE, 1999, 143 (1-4) : 78 - 84
  • [4] TEA CO2 laser-induced damage of low-thickness TiN coatings
    Gakovic, BM
    Trtica, MS
    Nenadovic, TM
    Obradovic, BJ
    [J]. THIN SOLID FILMS, 1999, 343 : 269 - 272
  • [5] A spectroscopic study of laser ablation plasmas from Ti, Al and C targets
    Hermann, J
    Vivien, C
    Carricato, AP
    Boulmer-Leborgne, C
    [J]. APPLIED SURFACE SCIENCE, 1998, 127 : 645 - 649
  • [6] MULTISTAGE PLASMA INITIATION PROCESS BY PULSED CO2-LASER IRRADIATION OF A TI SAMPLE IN AN AMBIENT GAS (HE, AR, OR N-2)
    HERMANN, J
    BOULMERLEBORGNE, C
    MIHAILESCU, IN
    DUBREUIL, B
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 73 (03) : 1091 - 1099
  • [7] Laser ablation and micropatterning of thin TiN coatings
    Kononenko, TV
    Garnov, SV
    Pimenov, SM
    Konov, VI
    Romano, V
    Borsos, B
    Weber, HP
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 71 (06): : 627 - 631
  • [8] NENADOVIC TM, 1996, ATOMIC COLLISION PRO, P153
  • [9] Schanin P.M., 2000, J TECH PHYS, V41, P177
  • [10] A REVIEW OF THE PRESENT STATE OF ART IN HARD COATINGS GROWN FROM THE VAPOR-PHASE
    SUNDGREN, JE
    HENTZELL, HTG
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (05): : 2259 - 2279