Precise and efficient surface flattening of polycrystalline diamond by normal-irradiated trochoidal femtosecond laser machining

被引:7
作者
Jin, Tianye [1 ,2 ]
Liu, Dehui [1 ]
Chen, Junyun [1 ,2 ]
Zhao, Teng [3 ]
Zhang, Chunyu [4 ]
机构
[1] Yanshan Univ, Sch Mech Engn, Qinhuangdao 066004, Hebei, Peoples R China
[2] Yanshan Univ, Ctr High Pressure Sci CHiPS, State Key Lab Metastable Mat Sci & Technol, Qinhuangdao 066004, Hebei, Peoples R China
[3] Shanghai Jiao Tong Univ, Univ Michigan Shanghai Jiao Tong Univ Joint Inst, Shanghai 200240, Peoples R China
[4] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Sichuan, Peoples R China
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
Femtosecond laser; Polycrystalline diamond; Trochoidal trajectory; Normal irradiation; Surface flattening; PULSED-LASER; MONOCRYSTALLINE DIAMOND; FABRICATION; BULK; TOOL; ABLATION;
D O I
10.1016/j.jmapro.2021.12.040
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The widely used polycrystalline diamond generally requires high smoothness and high efficiency in surface flattening. However, conventional machining methods, such as grinding and polishing, are not capable of processing the polycrystalline diamond with the desired high material removal rate owing to its high hardness, wear resistance and thermal stability. Femtosecond laser is considered an effective machining approach with high precision, but the machining efficiency is not satisfactory in terms of large-scale surface flattening. To further improve the processing efficiency with good surface smoothness, a strategy of normal-irradiated trochoidal femtosecond laser machining (NTFM) was developed in this study to process the polycrystalline diamond with Co binder. The theoretical analysis model, including the accumulated laser pulse number and the distribution of laser energy density, was first deduced for NTFM. The key influent factors were found to be the amplitude of galvanometer and the space between two adjacent laser scanning passes. Then, through machining microgrooves, it is proved that the material removal rate of NTFM was almost twice as high as the conventional nontrochoidal femtosecond laser milling (CFM). Besides, short pulse delay in the NTFM strategy can reduce the heat penetration and inhibit the falling-off of diamond grains. Thus, NTFM strategy is more favorable for generating smooth surface when compared to CFM. It is also found that improving the heat accumulation in NTFM is beneficial to decrease the graphitization level on the machined surface. Finally, a mirror-like large-scale surface of the polycrystalline diamond was successfully processed, with an average roughness of Ra 63 nm and P-V value of 0.741 mu m by NTFM, taking 30 min or only one-sixth of the time required by CFM. The results indicate that the proposed NTFM strategy is more practical to precise and highly efficient surface flattening of diamond compared to CFM.
引用
收藏
页码:456 / 464
页数:9
相关论文
共 37 条
[1]  
Aharonovich I, 2011, NAT PHOTONICS, V5, P397, DOI [10.1038/nphoton.2011.54, 10.1038/NPHOTON.2011.54]
[2]   Femtosecond laser inscription of Bragg grating waveguides in bulk diamond [J].
Bharadwaj, V. ;
Courvoisier, A. ;
Fernandez, T. T. ;
Ramponi, R. ;
Galzerano, G. ;
Nunn, J. ;
Booth, M. J. ;
Osellame, R. ;
Eaton, S. M. ;
Salter, P. S. .
OPTICS LETTERS, 2017, 42 (17) :3451-3453
[3]   Picosecond pulsed laser ablation of dielectric rods: Angle-dependent ablation process model for laser micromachining [J].
Boerner, P. ;
Hajri, M. ;
Wahl, T. ;
Weixler, J. ;
Wegener, K. .
JOURNAL OF APPLIED PHYSICS, 2019, 125 (23)
[4]   The influences of pulsed-laser-ablation and electro-discharge-grinding processes on the cutting performances of polycrystalline diamond micro-drills [J].
Butler-Smith, Paul ;
Warhanek, Maximilian ;
Axinte, Dragos ;
Fay, Michael ;
Bucourt, Jean-Francois ;
Ragueneau, Raphael ;
Wegener, Konrad .
CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2016, 65 (01) :105-108
[5]   Geometrical modelling of pulsed laser ablation of high performance metallic alloys [J].
Cha, D. ;
Axinte, D. ;
Billingham, J. .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2019, 141 :78-88
[6]   Advances in micro milling: From tool fabrication to process outcomes [J].
Chen, Ni ;
Li, Hao Nan ;
Wu, Jinming ;
Li, Zhenjun ;
Li, Liang ;
Liu, Gongyu ;
He, Ning .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2021, 160
[7]   Femtosecond laser micromachining of grooves in silicon with 800 nm pulses [J].
Crawford, THR ;
Borowiec, A ;
Haugen, HK .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (08) :1717-1724
[8]   Laser fabrication of diamond micro-cutting tool-related geometries using a high-numerical aperture micro-scanning system [J].
Eberle, Gregory ;
Dold, Claus ;
Wegener, Konrad .
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2015, 81 (5-8) :1117-1125
[9]   Surface structuring of polycrystalline diamond (PCD) using ultrashort pulse laser and the study of force conditions [J].
Fang, Shiqi ;
Klein, Sven .
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2019, 84
[10]   Numerical study of double-pulse laser ablation of Al [J].
Forster, G. D. ;
Lewis, Laurent J. .
PHYSICAL REVIEW B, 2018, 97 (22)