AlGaN/GaN MODFETs for high frequency and high power applications

被引:0
|
作者
Leier, H [1 ]
Vescan, A [1 ]
Dietrich, R [1 ]
Wieszt, A [1 ]
Tobler, H [1 ]
Van Hove, JM [1 ]
Chow, PP [1 ]
Wowchak, AM [1 ]
机构
[1] DaimlerChrysler AG, Res & Technol, D-89081 Ulm, Germany
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
We report on the fabrication and performance of high quality MBE grown AlGaN/GaN MODFETs with different vertical and lateral layout. High frequency devices with gate-length of 0.4 mu m show cut-off frequencies of ft=25GHz and fmax=50GHz. The breakdown voltage as a function of gate-drain seperation has been measured for devices with carrier densities Ns of 3-6x10(12)cm(-2). For a gate-drain distance of 2.5 mu m we obtain breakdown voltages between 200V and 300V corresponding to a breakdown field of approximately 1MV/cm.
引用
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页码:161 / 168
页数:8
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