Effects of proton irradiation on dc characteristics of InAlN/GaN high electron mobility transistors

被引:16
作者
Lo, C. F. [1 ]
Liu, L. [1 ]
Ren, F. [1 ]
Kim, H. -Y. [2 ]
Kim, J. [2 ]
Pearton, S. J. [3 ]
Laboutin, O. [4 ]
Cao, Yu [4 ]
Johnson, J. W. [4 ]
Kravchenko, I. I. [5 ]
机构
[1] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
[2] Korea Univ, Dept Chem & Biol Engn, Seoul 136701, South Korea
[3] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[4] Kopin Corp, Taunton, MA 02780 USA
[5] Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN 37830 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2011年 / 29卷 / 06期
关键词
aluminium compounds; contact resistance; gallium compounds; high electron mobility transistors; III-V semiconductors; indium compounds; proton effects; wide band gap semiconductors; PERFORMANCE; GAN;
D O I
10.1116/1.3644480
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effects of proton irradiation on the dc characteristics of InAlN/GaN high electron mobility transistors were investigated. In this study we used 5 MeV protons with doses varying from 2 x 10(11) to 2 x 10(15) cm(-2). The transfer resistance and contact resistivity suffered more degradation as compared to the sheet resistance. With irradiation at the highest dose of 2 x 10(15) cm(-2), both forward- and reverse-bias gate currents were increased after proton irradiation. A negative threshold-shift and reduction of the saturation drain current were also observed as a result of radiation-induced carrier scattering and carrier removal. Devices irradiated with doses of 2 x 10(11) to 2 x 10(15) cm(-2) exhibited minimal degradation of the saturation drain current and extrinsic transconductance. These results show that InAlN/GaN high electron mobility transistors are attractive for space-based applications when high-energy proton fluxes are present. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3644480]
引用
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页数:6
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