[1] Univ Karlsruhe, Lab Elektornenmikroskopie, D-76128 Karlsruhe, Germany
[2] Univ Karlsruhe, DFG Ctr Funct Nanostructures, D-76128 Karlsruhe, Germany
[3] Fraunhofer Inst Silicaforch, D-97082 Wurzburg, Germany
[4] Univ Karlsruhe, Inst Werkstoffe Elekt & CFN, D-76128 Karlsruhe, Germany
[5] Energy Technol Res Inst, Natl Inst Adv Ind Sci & Technol AIST, Tsukuba, Ibaraki 3058565, Japan