Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC0.5 + ZrO2 and (Ti, Zr)C0.5 + ZrO2 targets

被引：10

作者：

Shtansky, D. V. ^{[1
]}

Bondarev, A. V. ^{[1
]}

Kiryukhantsev-Korneev, Ph V. ^{[1
]}

Sheveyko, A. N. ^{[1
]}

Pogozhev, Yu S. ^{[1
]}

机构：

[1] Natl Univ Sci & Technol MISIS, Moscow, Russia

来源：

SURFACE & COATINGS TECHNOLOGY | 2012年 / 206卷 / 8-9期

关键词：

TiZrCO(N) coatings; Magnetron sputtering; Structure; Mechanical and tribological properties; High-temperature oxidation resistance; DOUBLE-LAYERED COATINGS; MECHANICAL-PROPERTIES; CORROSION BEHAVIORS; THERMAL-STABILITY; FILMS; MICROSTRUCTURE; HARD; FRICTION;

D O I：

10.1016/j.surfcoat.2011.10.057

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The effect of Zr and 0 incorporation on the structure and properties of TiC(N) coatings deposited by DC magnetron sputtering of composite TiC0.5 + xZrO(2) (x = 10 and 20 wt.%) and (Ti,Zr)C-0.5 + 10%ZrO2 targets in an argon atmosphere or reactively in a gaseous mixture of Ar + N-2 is presented. The structure, elemental and phase composition of the coatings were studied by means of X-ray diffraction, scanning electron microscopy, and glow discharge optical emission spectroscopy. The coatings were characterized in terms of their hardness, elastic modulus, and elastic recovery using the load-depth-sensing nanoindentation method. Tribological properties were investigated using ball-on-disk tests against cemented carbide at 25 degrees C and alumina in the temperature range of 25-500 degrees C. To evaluate the oxidation resistance, the coatings were annealed in air at 400, 550, and 600 degrees C for 1 h. The obtained results show that the TiZrCO(N) coatings exhibit a peak hardness versus nitrogen partial pressure. The coatings with maximum hardness tested at room temperature against WC + Co and Al2O3 counterparts showed low friction coefficients below 0.25. At higher temperatures 300-500 degrees C. the friction coefficient against an Al2O3 ball was recorded to be 0.6. The tribological tests of the coatings demonstrated their high wear resistance at moderate temperatures 25-300 degrees C (wear rate, k similar to 10(-6) mm(3)N(-1) m(-1)). Moreover, the coatings with high Zr content were the most wear resistant. The oxidation resistance of the Zr-doped TiCON coatings was not as high as expected and restricted by 600 degrees C. The combination of high hardness about 40 GPa with low friction coefficient and superior wear resistance makes the TiZrCON coatings promising candidates for various dry tribological applications. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：2506 / 2514

页数：9

共 43 条

[1] Influence of carbon chemical bonding on the tribological behavior of sputtered nanocomposite TiBC/a-C coatings [J].