Low Dark-Current Lateral Amorphous-Selenium Metal-Semiconductor-Metal Photodetector

被引:24
作者
Abbaszadeh, Shiva [1 ]
Allec, Nicholas [1 ]
Wang, Kai [1 ]
Karim, Karim S. [1 ]
机构
[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
关键词
Amorphous selenium (a-Se); indirect conversion X-ray imaging; metal-semiconductor-metal (MSM) photodetector;
D O I
10.1109/LED.2011.2160327
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a lateral amorphous-selenium (a-Se) metal-semiconductor-metal detector with a blocking contact. The blocking contact, a polyimide layer, is shown to significantly reduce the dark current even at high applied biases that result in high photo-current-to-dark-current ratios, thus leading to wide dynamic range and high signal-to-noise ratio. The use of the polyimide blocking contact prevents the injection of both holes and electrons and improves considerably upon the high dark current of previously reported lateral a-Se detectors. The proposed detector demonstrates the feasibility of low-cost lateral a-Se devices for indirect conversion digital X-ray imaging applications such as chest radiography, fluoroscopy, and computed tomography.
引用
收藏
页码:1263 / 1265
页数:3
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