Laser-induced surface drilling of silicon carbide

被引：49

作者：

Sciti, D ^{[1
]}

Bellosi, A ^{[1
]}

机构：

[1] Res Inst Ceram Technol, IRTEC, CNR, I-48018 Faenza, Italy

来源：

APPLIED SURFACE SCIENCE | 2001年 / 180卷 / 1-2期

关键词：

laser texturing; silicon carbide; microstructure;

D O I：

10.1016/S0169-4332(01)00330-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Laser microdrilling was performed on the surface of silicon carbide components, in order to investigate the surface modification in relationships with the laser processing parameters. Several SiC surfaces were laser textured with blind microholes different in shape and size and were analyzed. CO2 laser irradiation was proved to be efficient in producing regular shaped microholes due to the advantages of both small and focused spot size and complete control of individual pulse shape and power. Hole size (diameter and depth) and microstructural modification were related to laser processing parameters. On the basis of the preliminary tests carried out, regularly patterned surfaces were produced with a suitable choice of laser parameters. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：92 / 101

页数：10

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