Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator

被引:35
作者
Hussein, Hussein [1 ]
Tahhan, Aref [1 ]
Le Moal, Patrice [1 ]
Bourbon, Gilles [1 ]
Haddab, Yassine [1 ]
Lutz, Philippe [1 ]
机构
[1] Femto St Inst, Besancon, France
关键词
U-shaped actuator; electro-thermal; thermomechanichal; modelling; MEMS; FLEXURE ACTUATOR; SILICON; DESIGN; MICROACTUATORS; OPTIMIZATION; MICROSCALE; BEAM;
D O I
10.1088/0960-1317/26/2/025010
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we develop original analytical electro-thermal and thermo-mechanical models for the U-shaped electro-thermal actuator. The dynamics of the temperature distribution and displacement are obtained as a direct relationship between the system's dimensions, material properties and electrical input. The electro-thermal model provides an exact solution of the hybrid partial differential equations that describe the electro-thermal behaviour for each of the actuator's three connected arms. The solution is obtained using a new calculation method that allows the representation of an integrable function by a hybrid infinite sum of sine and cosine functions. The displacement at the actuator's tip is then calculated using a quasi-static model based on the superposition and virtual works principles. The obtained temperature and displacement solutions are then discussed and compared with finite element method simulations via ANSYS (R) and experimental results. Comparisons showed good agreement making the proposed modelling a reliable alternative which paves the way for improving the design and optimising the dimensions of U-shaped micro-actuators.
引用
收藏
页数:11
相关论文
共 50 条
  • [41] Method to Predict Lifetime of IGBT under Power Cycling based-on Fast Electro-Thermo-Mechanical Model
    Jiang, Maogong
    Fu, Guicui
    Leng, Hongyan
    Wan, Bo
    Cheng, Yu
    2018 19TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2018,
  • [42] Selecting Robust Multi-Objective Optimization of a MEMS Electro-Thermal Actuator Considering Multi-Source Uncertainties
    Zhu, Hengbo
    Cao, Yun
    Kong, Xiaoyu
    Lei, Shenghong
    Lu, Haining
    Nie, Weirong
    Xi, Zhanwen
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2023, 70 (07) : 3820 - 3827
  • [43] Molybdenum Microheaters for MEMS-Based Gas Sensor Applications: Fabrication, Electro-Thermo-Mechanical and Response Characterization
    Rao, Langoju Lakshmi Rajeswara
    Singha, Monoj Kumar
    Subramaniam, Kiruba Mangalam
    Jampana, Nagaraju
    Asokan, Sundarrajan
    IEEE SENSORS JOURNAL, 2017, 17 (01) : 22 - 29
  • [44] Design and Characterization of a Large Displacement Electro-thermal Actuator for a New Kind of Safety-and-Arming Device
    Zhao, Yu-Long
    Hu, Teng-Jiang
    Li, Xiu-Yuan
    Jiang, Zhuang-De
    Ren, Wei
    Bai, Ying-Wei
    Energy Harvesting and Systems, 2015, 2 (3-4) : 143 - 148
  • [45] Power efficient V-shape electro-thermal actuator using constrained su-8
    Lau, Gk
    Duc, T. Chu
    Goosen, Jfl
    Sarro, Pm
    van Keulen, F.
    TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
  • [46] Rectifier Dynamic Electro-Thermal Simulation for Power Factor Correction in Electric Vehicles Application
    Ayadi, Moez
    Ghariani, Moez
    Toumi, Amine
    JOURNAL OF ELECTRICAL ENGINEERING & TECHNOLOGY, 2016, 11 (05) : 1153 - 1164
  • [47] Thermo-Electro-Mechanical Analysis of a Curved Functionally Graded Piezoelectric Actuator with Sandwich Structure
    Yan, Zhi
    Zaman, Mostafa
    Jiang, Liying
    MATERIALS, 2011, 4 (12) : 2151 - 2170
  • [48] Dynamic testing of micromechanical structures under thermo-electro-mechanical influences
    Rinaldi, Gino
    Packirisamy, Muthukumaran
    Stiharu, Ion
    MEASUREMENT, 2007, 40 (06) : 563 - 574
  • [49] High-Speed Electro-Thermal Measurements in RF Power Amplifiers Using Thermo-Reflectance
    Jindal, Gautam
    Pomeroy, James W.
    Watkins, Gavin T.
    Morris, Kevin
    Kuball, Martin
    Cappello, Tommaso
    2022 INTERNATIONAL WORKSHOP ON INTEGRATED NONLINEAR MICROWAVE AND MILLIMETRE-WAVE CIRCUITS (INMMIC), 2022,
  • [50] Electro-Optic Directed XNOR Logic Gate Based on U-Shaped Waveguides and Microring Resonators
    Zhu, Weiwei
    Tian, Yonghui
    Zhang, Lei
    Yang, Lin
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 25 (14) : 1305 - 1308