Confocal micro-x-ray fluorescence spectrometer for light element analysis

被引：37

作者：

Smolek, S. ^{[1
]}

Pemmer, B. ^{[1
]}

Foelser, M. ^{[1
]}

Streli, C. ^{[1
]}

Wobrauschek, P. ^{[1
]}

机构：

[1] Vienna Univ Technol, Atominst, A-1020 Vienna, Austria

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 08期

基金：

奥地利科学基金会;

关键词：

PAINT LAYERS; XRF; OPTICS; ART;

D O I：

10.1063/1.4744934

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An existing micro-x-ray fluorescence (micro-XRF) spectrometer designed for light element analysis (6 <= Z <= 14) has been extended to confocal geometry: a second polycapillary x-ray optic has been introduced in front of the energy dispersive x-ray detector. New piezo positioners for optimum alignment of both optics have been installed inside the vacuum chamber. The spectrometer offers now the possibility of true 3D elemental analysis in the micrometer regime. Depth resolution varies between 100 mu m at 1 keV fluorescence energy (Na-K alpha) and 30 mu m for 17.5 keV (Mo). To further extend analytical capabilities a second x-ray tube with a Rh anode has been acquired to supplement to existing Mo anode tube. Lower limits of detection have been determined to be in the ppm region for confocal geometry. The spectrometer has been characterized and tested using different samples. Furthermore, results have been compared with SR micro-XRF to show the capabilities and limitations of this spectrometer. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4744934]

引用

页数：6

共 17 条

[1] A portable micro-X-ray fluorescence spectrometer with polycapillary optics and vacuum chamber for archaeometric and other applications [J].