Pressure effect on oxygen precipitate nucleation in Cz-Si, its structural evolution and phase transformation

被引：0

作者：

Antonova, IV ^{[1
]}

Popov, VP ^{[1
]}

Plotnikov, AE ^{[1
]}

Misiuk, A ^{[1
]}

Surma, B ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Semicond Phys, Novosibirsk 630090, Russia

来源：

APPLIED CRYSTALLOGRAPHY | 1998年

关键词：

D O I：

暂无

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Oxygen precipitate (OP) formation proceeds through the oxygen-rich;local areas (OP nuclei) creation in silicon matrix. The accumulation of oxygen atoms in these areas with annealing time leads to phase transformation. Utilization of enhanced pressure displaces the time of phase transformation towards the shorter annealing time and gives rise to creation of OP with smaller sizes and higher OP concentration.

引用

页码：358 / 361

页数：4