Wireless stretchable SAW sensors based on Z-cut lithium niobate

被引:2
|
作者
Floer, Cecile [1 ]
Hage-Ali, Sami [1 ]
Verzellesi, Louis [1 ]
Badie, Laurent [1 ]
Elmazria, Omar [1 ]
Zhgoon, Sergei [2 ]
机构
[1] Univ Lorraine, CNRS, Inst Jean Lamour, UMR 7198, Nancy, France
[2] Natl Res Univ MPEI, Moscow, Russia
来源
2019 IEEE SENSORS | 2019年
关键词
lithium niobate; SAW; stretchable; ultrathin; wireless;
D O I
10.1109/sensors43011.2019.8956784
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Surface acoustic wave devices are increasingly used as sensors, especially because they can be batteryless, wireless and packageless. With these features they become particularly interesting in the field of flexible electronics for the monitoring of the human body parameters. By combining a thinned lithium niobate Z-cut substrate to ultrathin and stretchable antennas, a remote temperature measurement has been demonstrated. The addition of two protective layers to obtain a packageless structure seems promising to achieve wireless temperature measurements on the skin.
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页数:3
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