Wireless stretchable SAW sensors based on Z-cut lithium niobate

被引：2

作者：

Floer, Cecile ^{[1
]}

Hage-Ali, Sami ^{[1
]}

Verzellesi, Louis ^{[1
]}

Badie, Laurent ^{[1
]}

Elmazria, Omar ^{[1
]}

Zhgoon, Sergei ^{[2
]}

机构：

[1] Univ Lorraine, CNRS, Inst Jean Lamour, UMR 7198, Nancy, France

[2] Natl Res Univ MPEI, Moscow, Russia

来源：

2019 IEEE SENSORS | 2019年

关键词：

lithium niobate; SAW; stretchable; ultrathin; wireless;

D O I：

10.1109/sensors43011.2019.8956784

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Surface acoustic wave devices are increasingly used as sensors, especially because they can be batteryless, wireless and packageless. With these features they become particularly interesting in the field of flexible electronics for the monitoring of the human body parameters. By combining a thinned lithium niobate Z-cut substrate to ultrathin and stretchable antennas, a remote temperature measurement has been demonstrated. The addition of two protective layers to obtain a packageless structure seems promising to achieve wireless temperature measurements on the skin.

引用

页数：3

共 29 条

[1] Novel design of Z-cut lithium niobate electrooptic modulator
Gorman, T.
Haxha, S.
MICRO-OPTICS 2008, 2008, 6992
[2] Lateral Surface Electrization of Z-Cut Lithium Niobate During Pyroelectric Effect
Oleinik, A. N.
Karataev, P., V
Klenin, A. A.
Kubankin, A. S.
Fedorov, K., V
Shchagin, A., V
RUSSIAN PHYSICS JOURNAL, 2020, 63 (01) : 119 - 125
[3] Lateral Surface Electrization of Z-Cut Lithium Niobate During Pyroelectric Effect
A. N. Oleinik
P. V. Karataev
A. A. Klenin
A. S. Kubankin
K. V. Fedorov
A. V. Shchagin
Russian Physics Journal, 2020, 63 : 119 - 125
[4] Comparison of y/36°-cut and z-cut lithium niobate composites for high temperature ultrasonic applications
Schmarje, N.
Kirk, K. J.
Cochran, S.
NONDESTRUCTIVE TESTING AND EVALUATION, 2005, 20 (02) : 77 - 87
[5] Quenching effects on crystallographic and optical properties of proton exchanged waveguides on Z-cut lithium niobate
Shevtsov, DI
Azanova, IS
Taysin, IF
Kalabin, IE
Atuchin, VV
Volyntsev, AB
Korus 2004, Vol 3, Proceedings, 2004, : 164 - 168
[6] Relationships between structural and optical properties of proton-exchanged waveguides on Z-cut lithium niobate
Korkishko, YN
Fedorov, VA
DeMicheli, MP
Baldi, P
ElHadi, K
Leycuras, A
APPLIED OPTICS, 1996, 35 (36): : 7056 - 7060
[7] Structural phase transitions during annealing of proton-exchanged layers in X-cut and Z-cut lithium niobate
Mushinsky, S. S.
Petukhov, I. V.
Permyakova, M. A.
Kichigin, V. I.
Malinina, L. N.
Volyntsev, A. B.
FERROELECTRICS, 2019, 541 (01) : 105 - 114
[8] Mode size studies on polarization variation in titanium-diffused Z-cut lithium niobate channel waveguides
Nair, KRS
Patro, YGK
Shevgaonkar, RK
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 1998, 19 (06) : 448 - 451
[9] Design of X-Cut and Z-Cut Lithium Niobate Whispering-Gallery-Mode Disk-Resonators With High Quality Factors
Pan, Yu
Lin, Guoping
Diallo, Souleymane
Zhang, Xianmin
Chembo, Yanne K.
IEEE PHOTONICS JOURNAL, 2017, 9 (04):
[10] Structure and Properties of Proton Exchanged Layers in +Z Cut and -Z Cut Lithium Niobate
Mushinsky, S. S.
Kichigin, V. I.
Petukhov, I. V.
Minkin, A. M.
Skachkov, A. P.
Salgaeva, U. O.
Malinina, L. N.
Shevtsov, D. I.
Volyntsev, A. B.
FERROELECTRICS, 2013, 443 (01) : 20 - 34

← 1 2 3 →