Photovoltaic characteristics of postdeposition iodine-doped amorphous carbon films by microwave surface wave plasma chemical vapor deposition

被引:33
作者
Omer, AMM
Adhikari, S
Adhikary, S
Uchida, H
Umeno, M
机构
[1] Chubu Univ, Dept Elect & Elect Engn, Kasugai, Aichi 4878501, Japan
[2] Chubu Univ, Dept Elect & Informat Engn, Kasugai, Aichi 4878501, Japan
关键词
D O I
10.1063/1.2089168
中图分类号
O59 [应用物理学];
学科分类号
摘要
The amorphous carbon thin films have been deposited on silicon and quartz substrates by microwave surface wave plasma chemical vapor deposition at low temperature (< 100 degrees C) in Ar/CH4 phase gas. Doping of iodine has been done in the postdeposited films by exposing them in iodine vapor. The photovoltaic measurements of the films were carried out before and after iodine doping. The results show dramatic decrease of optical gap from 3.4 to 0.9 eV corresponding to nondoping to iodine doping conditions, respectively. The preliminary photovoltaic characteristics of the film deposited on n-type silicon substrate under light illumination (AM1.5, 100 mW/cm(2)) reveal a short-circuit current density of 1.15 mu A/cm(2), open-circuit voltage of 177 mV and fill factor of 21.7%. (C) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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