Accurate integration of segmented 3D profile measurements using digital 2D fringe projection

被引:2
作者
Su, Wei-Hung [1 ]
Hsu, Yi-Ling [2 ]
Yu, Kun-Chang [3 ]
Liu, Hongyu [3 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Mat Sci & Optoelect Engn, Kaohsiung 804, Taiwan
[2] Natl Sun Yat Sen Univ, Inst Mat Sci, Kaohsiung 804, Taiwan
[3] Penn State Univ, Dept Elect Engn, University Pk, PA 16802 USA
关键词
fringe projection; 3D profile measurement; two-dimensional sinusoidal fringes; image registration; 3D data fusion;
D O I
10.1002/mop.23667
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An improved integration approach for segmented 3D shapes using projected digitalized 2D pattern is presented. The digital 2D patterns are fabricated based on lithography techniques. Geometrical accuracy better than 0.5 mu m can be achieved. Contrast ratio of the fringe pattern can be precisely controlled as well. With this pattern, integrated accuracy better than one part in one hundredth of the pixel size can be achieved. (C) 2008 Wiley Periodicals, Inc.
引用
收藏
页码:2474 / 2480
页数:7
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