Formation of two-dimensional electron gas at AlGaN/GaN heterostructure and the derivation of its sheet density expression

被引:52
作者
He Xiao-Guang [1 ]
Zhao De-Gang [1 ]
Jiang De-Sheng [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
基金
中国国家自然科学基金;
关键词
high electron mobility transistors; GaN; two-dimensional electron gas; polarization effect; MOLECULAR-BEAM EPITAXY; PIEZOELECTRIC POLARIZATION; INDUCED CHARGE;
D O I
10.1088/1674-1056/24/6/067301
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Models for calculating the sheet densities of two-dimensional electron gas (2DEG) induced by spontaneous and piezoelectric polarization in AlGaN/GaN, AlGaN/AlN/GaN, and GaN/AlGaN/GaN heterostructures are provided. The detailed derivation process of the expression of 2DEG sheet density is given. A longstanding confusion in a very widely cited formula is pointed out and its correct expression is analyzed in detail.
引用
收藏
页数:5
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