Angle measurement using a diffraction of optical frequency comb

被引：0

作者：

Nakamura, Kazuki ^{[1
]}

Matsukuma, Hiraku ^{[1
]}

Shimizu, Yuki ^{[1
]}

Gao, Wei ^{[1
]}

机构：

[1] Tohoku Univ, Dept Finemech, Precis Nanometrol Lab, Aoba Ku, 6-6-01 Aramaki Aza Aoba, Sendai, Miyagi 9808579, Japan

来源：

PROCEEDINGS OF THE 2018 IEEE INTERNATIONAL CONFERENCE ON ADVANCED MANUFACTURING (IEEE ICAM) | 2018年

基金：

日本学术振兴会;

关键词：

Angle measurement; Laser; Autocollimation;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The laser autocollimation utilizes the function of a lens to convert the angle change of a plane mirror into the displacement of a reflected laser beam focused spot on a photodetector. However, in this method, it is hard to achieve both a high resolution and a wide range measurement simultaneously. In this paper, a new optical angle sensor utilizing a broadband optical frequency comb generated from a femto-second laser source and a diffraction grating is proposed for solving this tradeoff.

引用

页码：26 / 27

页数：2

共 4 条

[1] AN AUTOCOLLIMATOR BASED ON THE LASER HEAD OF A COMPACT-DISK PLAYER
ARMSTRONG, TR
FITZGERALD, MP
[J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 1992, 3 (11) : 1072 - 1076
[2] HIGH-ACCURACY PROFILE MEASUREMENT OF QUASI-CONICAL MIRROR SURFACES BY LASER AUTOCOLLIMATION
ENNOS, AE
VIRDEE, MS
[J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1982, 4 (01): : 5 - 8
[3] Measurement technologies for precision positioning
Gao, W.
Kim, S. W.
Bosse, H.
Haitjema, H.
Chena, Y. L.
Lu, X. D.
Knapp, W.
Weckenmann, A.
Estler, W. T.
Kunzmann, H.
[J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2015, 64 (02) : 773 - 796
[4] Optical frequency metrology
Udem, T
Holzwarth, R
Hänsch, TW
[J]. NATURE, 2002, 416 (6877) : 233 - 237

← 1 →