Millimeter-Wave Air-Filled Slot Antenna With Conical Beam Based on Bulk Silicon MEMS Technology

被引：17

作者：

Hu, Jiadong ^{[1
]}

Li, Yue ^{[1
]}

Wang, Shaodong ^{[2
]}

Zhang, Zhijun ^{[1
]}

机构：

[1] Tsinghua Univ, Beijing Natl Res Ctr Informat Sci & Technol, Beijing 100084, Peoples R China

[2] Hebei Semicond Res Inst, Shijiazhuang 050000, Hebei, Peoples R China

来源：

IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION | 2020年 / 68卷 / 05期

基金：

中国国家自然科学基金;

关键词：

Bulk silicon microelectromechanical systems (MEMS) technology; conical beam; IC integration; indoor communication; millimeter wave (mm-wave); slot antenna; PATCH ANTENNA; LOW-COST;

D O I：

10.1109/TAP.2019.2949421

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this communication, a millimeter-wave (mm-wave) air-filled slot antenna with a conical beam at 60 GHz is proposed. The antenna is suitable to be integrated with various IC systems mainly because it is designed and fabricated based on bulk silicon microelectromechanical systems (MEMS) technology. The whole structure is composed of an antenna part and a waveguide to substrate integrated waveguide (SIW) converter. In the antenna part, four meander slots are arranged annularly and excited by a square air cavity. The conical radiation pattern benefits from the out-phase E-field excited on slots. An operating bandwidth of 2.17% for S11 <-10 dB and a conical beam peak gain of 3.21 dBi are achieved. The proposed antenna shows its potentials in mm-wave indoor communication.

引用

页码：4077 / 4081

页数：5