Millimeter-Wave Air-Filled Slot Antenna With Conical Beam Based on Bulk Silicon MEMS Technology

被引：20
作者：
Hu, Jiadong [1 ]
Li, Yue [1 ]
Wang, Shaodong [2 ]
Zhang, Zhijun [1 ]
机构：
[1] Tsinghua Univ, Beijing Natl Res Ctr Informat Sci & Technol, Beijing 100084, Peoples R China
[2] Hebei Semicond Res Inst, Shijiazhuang 050000, Hebei, Peoples R China
来源：
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION | 2020年 / 68卷 / 05期
基金：
中国国家自然科学基金;
关键词：
Bulk silicon microelectromechanical systems (MEMS) technology; conical beam; IC integration; indoor communication; millimeter wave (mm-wave); slot antenna; PATCH ANTENNA; LOW-COST;
D O I：
10.1109/TAP.2019.2949421
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this communication, a millimeter-wave (mm-wave) air-filled slot antenna with a conical beam at 60 GHz is proposed. The antenna is suitable to be integrated with various IC systems mainly because it is designed and fabricated based on bulk silicon microelectromechanical systems (MEMS) technology. The whole structure is composed of an antenna part and a waveguide to substrate integrated waveguide (SIW) converter. In the antenna part, four meander slots are arranged annularly and excited by a square air cavity. The conical radiation pattern benefits from the out-phase E-field excited on slots. An operating bandwidth of 2.17% for S11 <-10 dB and a conical beam peak gain of 3.21 dBi are achieved. The proposed antenna shows its potentials in mm-wave indoor communication.
引用
收藏
页码：4077 / 4081
页数：5
相关论文
共 22 条
[1]   Design and optimisation of axisymmetric millimetre-wave shaped lens antennas with directive, secant-squared and conical beams [J].
Bares, B. ;
Sauleau, R. .
IET MICROWAVES ANTENNAS & PROPAGATION, 2007, 1 (02) :433-439
[2]   Low-Profile Conical-Pattern Slot Antenna With Wideband Performance Using Artificial Magnetic Conductors [J].
Cao, Yun Fei ;
Zhang, Xiu Yin ;
Mo, Te .
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2018, 66 (05) :2210-2218
[3]   Planar Air-Filled Terahertz Antenna Array Based on Channelized Coplanar Waveguide Using Hierarchical Silicon Bulk Micromachining [J].
Chang, Le ;
Li, Yue ;
Zhang, Zhijun ;
Wang, Shaodong ;
Feng, Zhenghe .
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2018, 66 (10) :5318-5325
[4]   Low-Sidelobe Air-Filled Slot Array Fabricated Using Silicon Micromachining Technology for Millimeter-Wave Application [J].
Chang, Le ;
Li, Yue ;
Zhang, Zhijun ;
Li, Xiaolin ;
Wang, Shaodong ;
Feng, Zhenghe .
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2017, 65 (08) :4067-4074
[5]   60-GHz Air Substrate Leaky-Wave Antenna Based on MEMS Micromachining Technology [J].
Chang, Le ;
Zhang, Zhijun ;
Li, Yue ;
Wang, Shaodong ;
Feng, Zhenghe .
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2016, 6 (11) :1656-1662
[6]   High Gain Conical Beam Antenna Array Exploiting Grating Lobes [J].
Cui, Lan ;
Qi, Shi-Shan ;
Wu, Wen ;
Fang, Da-Gang .
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2015, 63 (02) :848-+
[7]   Permittivity and Loss Characterization of SU-8 Films for mmW and Terahertz Applications [J].
Ghalichechian, Nima ;
Sertel, Kubilay .
IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS, 2015, 14 :723-726
[8]   Millimeter-Wave Integrated Pyramidal Horn Antenna Made of Multilayer Printed Circuit Board (PCB) Process [J].
Ghassemi, Nasser ;
Wu, Ke .
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2012, 60 (09) :4432-4435
[9]   Low-Profile Substrate Integrated Dielectric Resonator Antenna Implemented With PCB Process [J].
Gong, Ke ;
Hu, Xue Hui .
IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS, 2014, 13 :1023-1026
[10]   A Millimeter-Wave Micromachined Air-Filled Slot Antenna Fed by Patch [J].
Liu, Peiqin ;
Chang, Le ;
Li, Yue ;
Zhang, Zhijun ;
Wang, Shaodong ;
Feng, Zhenghe .
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2017, 7 (10) :1683-1690
123