Detection of inactive defects in crystalline silicon by high-resolution transmission-electron energy-loss spectroscopy

被引：9

作者：

Kohno, H

Mabuchi, T

Takeda, S

Kohyama, M

Terauchi, M

Tanaka, M

机构：

[1] Osaka Univ, Dept Phys, Grad Sch Sci, Osaka 5600043, Japan

[2] Osaka Natl Res Inst, Dept Phys Mat, Osaka 5641155, Japan

[3] Tohoku Univ, Sci Measurements Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan

来源：

PHYSICAL REVIEW B | 1998年 / 58卷 / 16期

关键词：

D O I：

10.1103/PhysRevB.58.10338

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have applied high-resolution transmission electron energy-loss spectroscopy to explore the electronic structure of a reconstructed defect in the interior of Si crystal. Despite the electronic and optical inactivity of the defects, the L-2,L-3 near-edge structure becomes sharp within the narrow energy range (less than 1 eV) whenever an electron probe locates on the defects. Our analysis based on nb initio computations has suggested that the sharpened near edge arises from the odd-membered atomic ring in the defects. [S0163-1829(98)07140-9].

引用

页码：10338 / 10342

页数：5

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[21] Development of a high energy resolution electron energy-loss spectroscopy microscope [J].

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