Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures

被引：29
作者：
Kessels, Melanie V.
El Bouz, Marwa
Pagan, Robin
Heggarty, Kevin
机构：
[1] Ecole Natl Super Telecommun Bretagne Tech Brest, Grp Ecol Telecomm, F-29238 Brest 3, France
[2] MIVA Technol GmbH, D-71101 Schonaich, Germany
来源：
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2007年 / 6卷 / 03期
关键词：
lithography; real-time imaging; liquid crystals; spatial light modulators; micro-optics; illumination;
D O I：
10.1117/1.2767331
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A versatile photolithographic photoplotter based on a standard photoreduction stepper, where the reticle is replaced by a commercial liquid crystal microdisplay, is reported. The microdisplay module is designed as a drop-in replacement, allowing the photoplotter to be simply and quickly converted into a standard stepper, making it an extremely versatile, low-cost research and development tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1-mu m feature sizes into standard industrial photoresist. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed. (C) 2007 Society of Photo-Optical Instrumentation Engineers.
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页数：12
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