A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope

被引：17
作者：
Maehata, K. [1 ,2 ]
Hara, T. [3 ]
Mitsuda, K. [4 ]
Hidaka, M. [5 ]
Tanaka, K. [6 ]
Yamanaka, Y. [7 ]
机构：
[1] Kyushu Univ, Dept Appl Quantum Phys & Nucl Engn, Fukuoka 812, Japan
[2] Kyushu Univ, Res Inst Superconductor Sci & Syst, Nishi Ku, 744 Motooka, Fukuoka 8190395, Japan
[3] Natl Inst Mat Sci, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[4] Japan Aerosp Explorat Agcy ISAS JAXA, Inst Space & Astronaut Sci, Chuo Ku, 3-1-1 Yoshinodai, Sagamihara, Kanagawa 2525210, Japan
[5] Natl Inst Adv Ind Sci & Technol, 1-1-1 Umezono, Tsukuba, Ibaraki 3058568, Japan
[6] Hitachi High Tech Sci Co, 36-1 Takenoshita, Oyama, Shizuoka 4101393, Japan
[7] Taiyo Nippon Sanso Corp, 10 Okubo, Tsukuba, Ibaraki 3002611, Japan
来源：
JOURNAL OF LOW TEMPERATURE PHYSICS | 2016年 / 184卷 / 1-2期
关键词：
TES microcalorimeter; Scanning-transmission electron microscope; Energy dispersive spectroscopy; Dry-dilution refrigerator; Remote He cooling loop; HE-3-HE-4 DILUTION REFRIGERATOR; SPECTROMETER;
D O I：
10.1007/s10909-015-1361-3
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry He-He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir M, Pt M, and Ir M. Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si K X-ray energy resolution of 9.7 eV FWHM.
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页码：5 / 10
页数：6
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