Capacitance estimate for electrostatically actuated narrow microbeams

被引：60

作者：

Batra, R. C. ^{[1
]}

Porfiri, M. ^{[2
]}

Spinello, D. ^{[1
]}

机构：

[1] Virginia Polytech Inst & State Univ, Dept Engn Sci & Mech, Blacksburg, VA 24061 USA

[2] Polytech Univ, Dept Mech Aerosp & Mfg Engn, Brooklyn, NY 11201 USA

来源：

MICRO & NANO LETTERS | 2006年 / 1卷 / 02期

关键词：

D O I：

10.1049/mnl:20065046

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel estimate for the line-to-ground capacitance that accurately predicts the pull-in instability parameters for narrow electrostatically actuated microbeams is proposed. Parameters in the proposed formula are obtained by least square fitting data from a fully converged numerical solution with the method of moments. For a narrow microbeam, it is shown that the new formula significantly improves upon classical formulas that neglect fringing field effects due to the finite thickness of the microbeam cross-section.

引用

页码：71 / 73

页数：3

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