Fast and Accurate Machine Learning Inverse Lithography Using Physics Based Feature Maps and Specially Designed DCNN

被引：4

作者：

Shi, Xuelong ^{[1
]}

Yan, Yan ^{[1
]}

Zhou, Tao ^{[1
]}

Yu, Xueru ^{[1
]}

Li, Chen ^{[1
]}

Chen, Shoumian ^{[1
]}

Zhao, Yuhang ^{[1
]}

机构：

[1] Shanghai Integrated Circuits R&D Ctr Co Ltd, Shanghai, Peoples R China

来源：

IWAPS 2020: PROCEEDINGS OF 2020 4TH INTERNATIONAL WORKSHOP ON ADVANCED PATTERNING SOLUTIONS (IWAPS) | 2020年

关键词：

Optimal feature maps; inverse lithography technology (ILT); deep convolution neural network (DCNN);

D O I：

10.1109/iwaps51164.2020.9286814

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

To achieve full chip inverse lithography technology (ILT) solution, we proposed a hybrid approach in this study by combining first few physics based feature maps as model input with a specially designed DCNN structure to learn the rigorous ILT algorithm. Our results show that this approach can make machine learning ILT easy, fast and more accurate.

引用

页码：9 / 11

页数：3

共 50 条

[41] A Feature-Based Approach for Sentiment Quantification Using Machine Learning
Ayyub, Kashif
Iqbal, Saqib
Nisar, Muhammad Wasif
Munir, Ehsan Ullah
Alarfaj, Fawaz Khaled
Almusallam, Naif
ELECTRONICS, 2022, 11 (06)
[42] Mushroom Classification Using Feature-Based Machine Learning Approach
Maurya, Pranjal
Singh, Nagendra Pratap
PROCEEDINGS OF 3RD INTERNATIONAL CONFERENCE ON COMPUTER VISION AND IMAGE PROCESSING, CVIP 2018, VOL 1, 2020, 1022 : 197 - 206
[43] AccurateML: Information-aggregation-based Approximate Processing for Fast and Accurate Machine Learning on MapReduce
Han, Rui
Zhang, Fan
Wang, Zhentao
IEEE INFOCOM 2017 - IEEE CONFERENCE ON COMPUTER COMMUNICATIONS, 2017,
[44] Accurate water level predictions in a tidal reach: Integration of Physics-based and Machine learning approaches
Fei, Kai
Du, Haoxuan
Gao, Liang
JOURNAL OF HYDROLOGY, 2023, 622
[45] Spherical Maps of Acoustic Properties as Feature Vectors in Machine-Learning-Based Estimation of Acoustic Parameters
Perez, Ricardo Falcon
Gotz, Georg
Pulkki, Ville
JOURNAL OF THE AUDIO ENGINEERING SOCIETY, 2021, 69 (09): : 632 - 643
[46] Pedestrian Detection Using an Extended Fast RCNN based on a Secure Margin in RoI Feature Maps
Saeidi, Mahmoud
Ahmadi, Ali
2018 9TH INTERNATIONAL SYMPOSIUM ON TELECOMMUNICATIONS (IST), 2018, : 155 - 159
[47] A Fast Decision Algorithm for VVC Intra-Coding Based on Texture Feature and Machine Learning
Zhao, Jinchao
Li, Peng
Zhang, Qiuwen
COMPUTATIONAL INTELLIGENCE AND NEUROSCIENCE, 2022, 2022
[48] An adaptive Physics-based feature engineering approach for Machine Learning-assisted alloy discovery
Soofi, Yasaman J.
Gu, Yijia
Liu, Jinling
COMPUTATIONAL MATERIALS SCIENCE, 2023, 226
[49] Down Syndrome Prediction Using a Cascaded Machine Learning Framework Designed for Imbalanced and Feature-correlated Data
Li, Ling
Liu, Wanying
Zhang, Hongguo
Jiang, Yuting
Hu, Xiaonan
Liu, Ruizhi
IEEE ACCESS, 2019, 7 (97582-97593) : 97582 - 97593
[50] A Fast and Accurate Method for Classifying Tomato Plant Health Status Using Machine Learning and Image Processing
Ulutas, Hasan
Aslantas, Veysel
ELEKTRONIKA IR ELEKTROTECHNIKA, 2023, 29 (02) : 54 - 68

← 1 2 3 4 5 →