This paper presents a single cell oxygen consumption rate monitoring device based on the electrochemical microelectrode, which features simple cell capture structure, high spatial resolution and multichannel real-time sensing. The device is fabricated with planar microfabrication techniques, therefore having the advantages of low-cost and mass production. An oxygen permeable membrane has been applied to the electrodes to enhance the sensitivity. A model based data processing method is proposed. The single cell metabolism has been monitored with drug tests.