Local Crystallization of Noncrystallized PbTiO3 Thin Film by a Heated Atomic Force Microscope Tip

被引：1

作者：

Son, Jong Yeog ^{[1
]}

Jung, Inhwa ^{[2
]}

Lee, Min Jea ^{[3
]}

机构：

[1] Kyung Hee Univ, Dept Appl Phys, Coll Appl Sci, Suwon 446701, South Korea

[2] Kyung Hee Univ, Dept Mech Engn, Coll Appl Sci, Suwon 446701, South Korea

[3] Kyung Hee Univ, Dept Appl Chem, Coll Appl Sci, Suwon 446701, South Korea

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 2012年 / 95卷 / 05期

关键词：

LITHOGRAPHY; DEPOSITION;

D O I：

10.1111/j.1551-2916.2012.05167.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We report locally crystallized ferroelectric nanodots in a noncrystallized PbTiO3 thin film with a thickness of about 50nm. A sol PbTiO3 thin film was deposited on a Pt/TiO2/SiO2/Si substrate by a spin coating process. To form a noncrystallized PbTiO3 thin film, the sol PbTiO3 thin film was annealed at 450 degrees C for 1h. Locally crystallized nanodots were formed by the local crystallization process using an atomic force microscopy tip heated to 700 degrees C. We adjusted the diverse diameters of locally crystallized PbTiO3 nanodots in the range from 200 to 400nm by controlling the local heating times.

引用

页码：1511 / 1513

页数：3

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