Gytrix, a novel axisymmetric quartz MEMS gyroscope for navigation purpose

被引:0
作者
Perrier, Thomas [1 ]
Le Traon, Olivier [1 ]
Levy, Raphael [1 ]
Guerard, Jean [1 ]
Ledier, Amandine Andrieux [1 ]
Lavenus, Pierre [1 ]
机构
[1] ONERA The French Aeroscpace Lab, Phys & Instrumentat Dept, Chatillon, France
来源
2022 9TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (IEEE INERTIAL 2022) | 2022年
关键词
Gyro; quartz; MEMS;
D O I
10.1109/INERTIAL53425.2022.9787719
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports a novel axisymmetric quartz MEMS gyroscope, named GYTRIX, able to work -for the first time to our knowledge- as a whole angle gyro. The proposed GYTRIX cell differs from the state of the art by the use of balanced vibration modes, naturally decoupled from the support, and a very simple and pure axisymmetric design, implementing an original principle of decoupling of the useful modes, which gives the resonators very high quality factors. As a proof of concept, the gyroscope presented is designed to operate in open-loop mode in order to facilitate the first characterizations of the cell. Thanks to its symmetry, isotropy and high quality factor, the gyroscope characteristics give up towards a theoretical angular random walk of 0.003 degrees/root h and a bias stability better than 0.1 degrees/h.
引用
收藏
页数:4
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