Design methods for micro-electro-mechanical bandpass filters

被引：0

作者：

Galayko, D ^{[1
]}

Kaiser, A ^{[1
]}

机构：

[1] Inst Super Elect N, IEMN, UMR CNRS 8520, F-59046 Lille, France

来源：

DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001 | 2001年 / 4408卷

关键词：

electro-mechanical filter; trasducer; IF; devices and components; structured design methodologies;

D O I：

10.1117/12.425373

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A design method for high-order electro-mechanical filters that makes use of the equivalence between lumped-parameters electrical and mechanical systems is presented. Conditions for existence of the equivalent mechanical system are derived, and electro-statical coupling of micro-mechanical resonators is introduced. The application to the simulation and design of a bandpass filter with finite transmission zeros implemented in a thick-layer epi-poly silicon micro-machining technology is shown.

引用

页码：194 / 200

页数：7

共 6 条

[1]

ATABEKOV G, 1966, ENERGY

[2]

JINT Q, CMOS MICROMECHANICAL

[3] Micromachined devices for wireless communications [J].

Nguyen, CTC ;

Katehi, LPB ;

Rebeiz, GM .

PROCEEDINGS OF THE IEEE, 1998, 86 (08) :1756-1768

[4] VHF free-free beam high-Q micromechanical resonators [J].

Wang, K ;

Yu, YL ;

Wong, AC ;

Nguyen, CTC .

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :453-458

[5] High-order micromechanical electronic filters [J].

Wang, K ;

Nguyen, CTC .

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, :25-30

[6]

Zverev A.I., 1967, HDB FILTER SYNTHESIS

← 1 →