Radical detection in a methane plasma

被引：9

作者：

Kang, HD ^{[1
]}

Dose, V ^{[1
]}

机构：

[1] Max Planck Inst Plasma Phys, EURATOM Assoc, Ctr Interdisciplinary Plasma Serv, D-85728 Garching, Germany

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2003年 / 21卷 / 06期

关键词：

D O I：

10.1116/1.1621405

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present a method for detecting and quantifying the concentration of free radicals produced in a low temperature methane process plasma employing quadrupole mass spectrometry and Bayesian analysis. The latter includes a model comparison to determine species expected in the plasma and a parameter estimation of their concentrations and cracking coefficients. We find that the neutral mass spectra are best explained by incorporating the neutral molecules H-2, CH4, C2H2, C2H4, and C2H6 as well as the radicals H, CH3, and C2H5 into the model. (C) 2003 American Vacuum Society.

引用

页码：1978 / 1980

页数：3

共 17 条

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[2]

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