Integration of Vertical Grating Couplers and Microfluidic Channels with Silicon Photonic Wire Biosensor Arrays

被引：4

作者：

Densmore, A. ^{[1
]}

Xu, D. -X. ^{[1
]}

Cheben, P. ^{[1
]}

Vachon, M. ^{[1
]}

Janz, S. ^{[1
]}

Ma, R. ^{[1
]}

Bedard, D. ^{[1
]}

Li, Y. ^{[2
]}

Lopinski, G. ^{[2
]}

Delage, A. ^{[1
]}

Schmid, J. H. ^{[1
]}

Halir, R. ^{[3
]}

Molina-Fernandez, I. ^{[3
]}

机构：

[1] Natl Res Council Canada, Inst Microstruct Sci, 1200 Montreal Rd, Ottawa, ON K1A 0R6, Canada

[2] Natl Res Council Canada, Steacie Inst Mol Sci, Ottawa, ON K1A 0R6, Canada

[3] Univ Malaga, ETSI Telecomunicac, Dept Ingn Comunicaciones, Malaga, Spain

来源：

2010 IEEE SENSORS | 2010年

关键词：

HIGH-SENSITIVITY; RESONATOR; SENSORS;

D O I：

10.1109/ICSENS.2010.5690313

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe a new label-free biosensor array chip developed for the real-time, simultaneous monitoring of multiple molecular binding reactions. It is composed of monolithically integrated grating couplers, microfluidic channels and spiral cavity silicon photonic wire sensors. The grating couplers use a novel design for coupling to the transverse magnetic mode of a silicon photonic wire. They contain arrays of subwavelength dimension holes, which allow the local refractive index to be engineered in the grating region. They can be fabricated with the photonic wires in a single etch step, an important advantage over other vertical couplers. The coiled waveguides are configured as ring resonators with extended cavity length for high sensitivity and small footprint for compatibility with microarray spotting. For analyte delivery, microfluidic channels were formed in an SU-8 overlayer.

引用

页码：1550 / 1553

页数：4