Electromigration-Induced Interfacial Reactions in Cu/Sn/Electroless Ni-P Solder Interconnects

被引:21
作者
Huang, M. L. [1 ]
Zhou, S. M. [1 ]
Chen, L. D. [1 ]
机构
[1] Dalian Univ Technol, Sch Mat Sci Engn, Elect Packaging Mat Lab, Dalian 116024, Peoples R China
基金
中国国家自然科学基金;
关键词
Electromigration; interfacial reaction; cross-solder interaction; downwind diffusion; upwind diffusion; Cu/Sn/electroless Ni-P; INTERMETALLIC COMPOUND FORMATION; LINE-TYPE CU/SN/CU; ELECTROLESS; DIFFUSION; GROWTH;
D O I
10.1007/s11664-012-1952-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effect of electromigration (EM) on the interfacial reaction in a line-type Cu/Sn/Ni-P/Al/Ni-P/Sn/Cu interconnect was investigated at 150A degrees C under 5.0 x 10(3) A/cm(2). When Cu atoms were under downwind diffusion, EM enhanced the cross-solder diffusion of Cu atoms to the opposite Ni-P/Sn (anode) interface compared with the aging case, resulting in the transformation of interfacial intermetallic compound (IMC) from Ni3Sn4 into (Cu,Ni)(6)Sn-5. However, at the Sn/Cu (cathode) interface, the interfacial IMCs remained as Cu6Sn5 (containing less than 0.2 wt.% Ni) and Cu3Sn. When Ni atoms were under downwind diffusion, only a very small quantity of Ni atoms diffused to the opposite Cu/Sn (anode) interface and the interfacial IMCs remained as Cu6Sn5 (containing less than 0.6 wt.% Ni) and Cu3Sn. EM significantly accelerated the dissolution of Ni atoms from the Ni-P and the interfacial Ni3Sn4 compared with the aging case, resulting in fast growth of Ni3P and Ni2SnP, disappearance of interfacial Ni3Sn4, and congregation of large (Ni,Cu)(3)Sn-4 particles in the Sn solder matrix. The growth kinetics of Ni3P and Ni2SnP were significantly accelerated after the interfacial Ni3Sn4 IMC completely dissolved into the solder, but still followed the t (1/2) law.
引用
收藏
页码:730 / 740
页数:11
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