Structural properties of swift heavy ion beam irradiated Fe/Si bilayers

被引：11
|
作者：
Senthilarasu, S
Sathyamoorthy, R [1 ]
Lalitha, S
Avasthi, DK
机构：
[1] Kongunadu Arts & Sci Coll, R&D Dept Phys, Coimbatore 29, Tamil Nadu, India
[2] Ctr Nucl Sci, New Delhi 97, India
来源：
THIN SOLID FILMS | 2005年 / 490卷 / 02期
关键词：
Fe/Si bilayer; ion irradiation; beta-FeSi2; structural; thin films;
D O I：
10.1016/j.tsf.2005.04.051
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The Fe/Si multilayers were prepared by electron beam evaporation in a cryo-pumped vacuum deposition system. Ag+ and Au+ ions of 100 MeV at two different fluencies such as 1 x 10(12) ions/cm(2) and 1 x 10(13) ions/cm(2) at a pressure of 10(-7) torr were used to irradiate the Fe/Si samples. The irradiated samples were analyzed by High-Resolution XRD and it reveals that the irradiated films are having polycrystalline nature and it confirms the formation of the beta-FeSi2. The structural parameters such as crystallite size (D), strain (epsilon) and dislocation density (6) have been evaluated from the XRD spectrum. The role of the substrates and the influence of swift heavy ions on the formation of beta-FeSi2 have been discussed in this paper. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：177 / 181
页数：5
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