Microactuators of free-standing TiNiCu films

被引：27

作者：

Fu, Y. Q. ^{[1
]}

Luo, J. K. ^{[1
]}

Flewitt, A. J. ^{[1
]}

Ong, S. E. ^{[2
]}

Zhang, S. ^{[2
]}

Du, H. J. ^{[2
]}

Milne, W. I. ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Elect Engn Div, Cambridge CB3 0FA, England

[2] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore

来源：

SMART MATERIALS AND STRUCTURES | 2007年 / 16卷 / 06期

关键词：

D O I：

10.1088/0964-1726/16/6/070

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Ti50Ni47Cu3 films were prepared using magnetron sputtering deposition, and their martensitic transformation and mechanical properties were characterized. Free-standing TiNiCu films showed an intrinsic two-way shape memory effect which is attributed to a composition gradient through the film thickness. Different types of TiNiCu microactuators, including microtweezers and microcages, have been successfully fabricated which employ this two-way shape memory effect for operation. Upon heating/cooling, the microtweezers showed both horizontal and vertical displacement due to combined shape memory and thermal effects. The microcage actuators could be opened/closed through substrate heating with a maximum temperature of 90 degrees C, or by electrical heating with a power less than 5 mW and a maximum frequency of 100-300 Hz. Issues related to the fabrication and applications, such as stability and beam bending after release, have been addressed.

引用

页码：2651 / 2657

页数：7